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The high performance fine focus ion source FDG 15. 

Key Features
  • True differential pumping

    Non line-of-sight filament

    Integrated port aligner

    Ion current measurement

  • Up to 300 mm working distance 

    Variable spot size

    Full specification ↴





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The FDG 15 uses the same proven beam generation as the FDG 150 and can be used as a substitute for all applications where e.g. the wide spread but no longer available ISE 10 (Leybold/Kremer/OMICRON) has been used in the past.

In addition the FDG 15 comes with a more flexible ion optics to adjust for longer working distances and an optional ion flux stabilization.