The high performance fine focus ion source FDG 15.
True differential pumping
Non line-of-sight filament
Integrated port aligner
Ion current measurement
Up to 300 mm working distance
Variable spot size
The FDG 15 uses the same proven beam generation as the FDG 150 and can be used as a substitute for all applications where e.g. the wide spread but no longer available ISE 10 (Leybold/Kremer/OMICRON) has been used in the past.
In addition the FDG 15 comes with a more flexible ion optics to adjust for longer working distances and an optional ion flux stabilization.